3 DEKTAK IIA SURFACE PROFILE MEASURING SYSTEM SCOPE This document establishes the procedures for surface profile measurements using the Dektak surface profilometer in the Undergraduate Microfabrication Laboratory (Microlab). APPLICABLE DOCUMENTS Dektak logbook Dektak IIA Installation, Operation and Maintenance Manual MATERIALS AND EQUIPMENT. · 3 of the measurement, see table. So while the um, um, and 1mm scan ranges would all work for a 10um step, the um is the best. 3. Profile: Will determine whether you start at bottom, middle, or top of designated height www.doorway.ru Size: KB. Standard Operating Procedure – BNC DEKTAK 8M (Stylus Profilometer 3) 2 3. Read and fully understand the SOP 4. Receive training on the profilometer by an authorized Super User and User. 5. Sign the authorized user sheet to affirm that the above steps have been completed.
The Dektak 3 Surface Profilometer is an instrument to measure the vertical profile of samples, thin film thickness, and other topographical features, such as film roughness or wafer bowing. A diamond stylus is moved vertically into in contact with the sample and then moved laterally across the sample for a specified distance and specified contact force. Dektak XT 2D Profilometer Operation Manual The Dektak XT is a 2D contact profilometer used for step height, pitch an d surface roughness measurements. Vision 64 application software controls the system data collection and analysis. Specifications • Stylus Contact Profilometry • Two-dimensional surface profile measurements. Standard Operating Procedure – BNC DEKTAK 8M (Stylus Profilometer 3) 2 3. Read and fully understand the SOP 4. Receive training on the profilometer by an authorized Super User and User. 5. Sign the authorized user sheet to affirm that the above steps have been completed.
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